Saturday, December 19, 2009

Laser Annealing Systems


Excimer Laser Annealing System ELA-TW Series
Excimer Laser Annealing System ELA-TW Series
Liquid crystal display method
Laser annealing is a technology used in the manufacturing process of liquid crystal displays to modify the silicon coating on a glass substrate into polycrystal silicon (annealing means heat processing). This method is used for the manufacture of high-performance and superior image quality polysilicon TFT liquid crystal panels.
The method previously used involved placing a highly expensive thermal resistant glass substrate in a high temperature furnace (1,000 degrees Celsius) and melting it. This was a not common practice. By using a laser, however, it is not only possible to achieve crystallization at a lower temperature (about 400 degrees Celsius) in a short time, but more moderately priced glass substrates can be used. This has become the key for reducing the costs required for the mass production of high-performance liquid crystal displays.
Applicable Markets
The principal application of laser annealing systems at the present time is low-temperature polysilicon liquid crystal displays. The market for this type of display has been growing at more than 20% annually, with its applications expanding to include monitors for digital cameras, mobile phones, PDAs (personal digital assistants), and laptop computers. For this reason, more and more laser annealing systems are being installed in the mass production lines of liquid crystal displays.
The method previously used involved placing a highly expensive thermal resistant glass substrate in a high temperature furnace (1,000 degrees Celsius) and melting it. This was a not common practice. By using a laser, however, it is not only possible to achieve crystallization at a lower temperature (about 400 degrees Celsius) in a short time, but more moderately priced glass substrates can be used. This has become the key for reducing the costs required for the mass production of high-performance liquid crystal displays.
Japanese manufacturer with complete customer support
We have developed and are delivering our highly productive ELA-TW series of systems, for the mass production lines of large-scale glass substrates, to major liquid crystal manufacturers in Japan.
Furthermore, we are contributing to the further improvement of quality and productivity through such means as our alliance formed with SOPRA of France in July 2002, to promote commercialization of the ELA-SOPRA series of products for mass production, which use a laser oscillator with the highest energy level and beam stability in the industry.
We are the only laser annealing system manufacturer in Japan that manufactures all components internally, including our laser oscillators. We have gained the trust of our customers through the complete customer support we provide.

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